Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6153849 | Method and apparatus for preventing etch rate drop after machine idle in plasma etch chamber | Ken-Yuan Yung, Ming YAN, Wen-Bing Lin, Chuan-Yi Wang | 2000-11-28 |
TC
Tsar-Yi Chen
Overall (All Time): #3,635,176 of 4,157,543Top 90%
1
Patents All Time