Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6169015 | Method and apparatus for controlling the dosage of ions implanted into a semiconductor wafer | — | 2001-01-02 |
| 6030509 | Apparatus and method for shielding a wafer holder | Li Hung-Yeh | 2000-02-29 |