Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635580 | Apparatus and method for controlling wafer temperature in a plasma etcher | R. Y. Yang | 2003-10-21 |
TC
T. Chen
Overall (All Time): #3,526,024 of 4,157,543Top 85%
1
Patents All Time