Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6056851 | Slurry supply system for chemical mechanical polishing | Li Chen | 2000-05-02 |
| 5759916 | Method for forming a void-free titanium nitride anti-reflective coating(ARC) layer upon an aluminum containing conductor layer | Te-Ming Hsu, Li Chen | 1998-06-02 |
| 5552339 | Furnace amorphous-SI cap layer to prevent tungsten volcano effect | — | 1996-09-03 |