Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252777 | Physical vapor deposition (PVD) system and method of processing target | Ming-Hsien Lin, Po-Wei Wang, Hsiao-Feng Lu | 2025-03-18 |
| 11935728 | Apparatus and method of manufacturing a semiconductor device | Tsung-Cheng WU, Ming-Hsien Lin, Chun-Fu Chen | 2024-03-19 |
| 11569071 | Cover ring and ground shield for physical vapor deposition chamber | Tsung-Cheng WU, Ming-Hsien Lin | 2023-01-31 |