Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020933 | Trench etching process for photoresist line roughness improvement | I-Chih Chen, Ching-Pei Hsieh, Kuan-Jung Chen | 2024-06-25 |
| 11527406 | Trench etching process for photoresist line roughness improvement | I-Chih Chen, Ching-Pei Hsieh, Kuan-Jung Chen | 2022-12-13 |
| 11271111 | Source/drain structure with barrier in FinFET device and method for forming the same | Ting-Chun Kuan, I-Chih Chen, Chih-Mu Huang, Fu-Tsun Tsai, Kuan-Jung Chen | 2022-03-08 |
| 11145760 | Structure having improved fin critical dimension control | Kuan-Jung Chen, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin | 2021-10-12 |
| 10153278 | Fin-type field effect transistor structure and manufacturing method thereof | I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Ru-Shang Hsiao, Ting-Chun Kuan | 2018-12-11 |