Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12241157 | System and method for cleaning a pre-clean process chamber | Yu-Ting Tsai, Hung-Chih Wang, Hong-Ming Lo, Su-Yu Yeh | 2025-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12241157 | System and method for cleaning a pre-clean process chamber | Yu-Ting Tsai, Hung-Chih Wang, Hong-Ming Lo, Su-Yu Yeh | 2025-03-04 |