Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665168 | Electrostatic chuck apparatus and method for efficiently dechucking a substrate therefrom | — | 2003-12-16 |
| 6221203 | Apparatus and method for controlling temperature of a chamber | Yi-Lang Wu | 2001-04-24 |