Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968753 | Vibration-dampening base for ball-type lead screw of load port transfer system | Huan-Liang Tzeng, Tzu-Chieh Chou | 2005-11-29 |
| 6863772 | Dual-port end point window for plasma etcher | Huan-Liang Tzeng, Jung-Hsiang Chang | 2005-03-08 |
| 6844082 | Gas distribution plate with anodized alumnium coating | Huan-Liang Tzeng, Jung-Hsiang Chang | 2005-01-18 |
| 6485605 | High temperature process chamber having improved heat endurance | Huan-Liang Tseng, Hsyun-Ying Chan | 2002-11-26 |