Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8724088 | Pellicle mounting apparatus and assembly with pellicle mounted on mask | Jiin-Hong Lin, Chih-Chen Chen | 2014-05-13 |
| 8563227 | Method and system for exposure of a phase shift mask | Chih-Ming Chen, Ya-Ping Tseng | 2013-10-22 |
| 8288081 | Method and system for exposure of a phase shift mask | Chih-Ming Chen, Ya-Ping Tseng | 2012-10-16 |
| 8268514 | Pellicle mounting method and apparatus | Jiin-Hong Lin, Chih-Chen Chen | 2012-09-18 |
| 7387855 | Anti-ESD photomask blank | Eric T. Chiang, Hung-Chun Wang, Min-Chih Hsieh | 2008-06-17 |
| 6765645 | De-pellicle tool | Kuang-Yang Lee, Chi-Chang Chang, Bill Chiu | 2004-07-20 |