MC

Ming Chen

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,348,652 of 4,157,543Top 85%
1
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7333875 Method of predicting CMP removal rate for CMP process in a CMP process tool in order to determine a required polishing time Yen Chuang 2008-02-19