Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583345 | Method for overcoming broken line and photoresist scum issues in tri-layer photoresist patterning | Wen-Yen Chen | 2017-02-28 |
| 9159561 | Method for overcoming broken line and photoresist scum issues in tri-layer photoresist patterning | Wen-Yen Chen | 2015-10-13 |