Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6193804 | Apparatus and method for sealing a vacuum chamber | Hao-Wei Chang, Ching-Kun Hung | 2001-02-27 |
| 6017393 | Photoresist supply system with air venting | Jen Song Liu, Bii-Junq Chang, Hao-Wei Chang | 2000-01-25 |
| 5858466 | Photoresist supply system with air venting | Jen Song Liu, Bii-Juno Chang, Hao-Wei Chang | 1999-01-12 |