Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659794 | Particle improvement for single wafer apparatus | Ming-Sung Hung, Yu-Kuei Lee, Cheng-Nan Kao | 2017-05-23 |
| 9508815 | Semiconductor device and method for manufacturing thereof | Fu-An Li, Cheng-Chun Tsai, Ting-Hsien Chen, Mu-Kai Tung, Ben Wang +1 more | 2016-11-29 |
| 9406525 | Method for semiconductor manufacturing | Pei-Wen Chi, Hsueh-Chin Lu, Shin Hsien Liao | 2016-08-02 |
| 9202809 | Semiconductor device and method for manufacturing thereof | Fu-An Li, Cheng-Chun Tsai, Ting-Hsien Chen, Mu-Kai Tung, Ben Wang +1 more | 2015-12-01 |
| 6776850 | Preventative maintenance aided tool for CVD chamber | Miao-Cheng Liao, Ying-Lang Wang, Hsiang-Sheng Cheng, Sheng-Te Shu, Chih-Yuan Yang | 2004-08-17 |