Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8417362 | Advanced process control for semiconductor processing | Chun-Hsien Lin | 2013-04-09 |
| 7751908 | Method and system for thermal process control | Yung-Chih Chang, Cheng Sun, Chun-I Kuo, Fu-Kun Yeh | 2010-07-06 |
| 7534725 | Advanced process control for semiconductor processing | Chun-Hsien Lin | 2009-05-19 |
| 7437404 | System and method for improving equipment communication in semiconductor manufacturing equipment | — | 2008-10-14 |
| 6980873 | System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment | — | 2005-12-27 |