Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142497 | Heating platform, thermal treatment and manufacturing method | Hann-Ru Chen | 2024-11-12 |
| 11107708 | Heating platform, thermal treatment and manufacturing method | Hann-Ru Chen | 2021-08-31 |
| 11062886 | Apparatus and method for controlling wafer uniformity | Hann-Ru Chen | 2021-07-13 |