Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852982 | Semiconductor manufacturing system | Chih-Yuan Yao, Yu-Yu Chen | 2023-12-26 |
| 11385555 | Semiconductor manufacturing system and particle removal method | Chih-Yuan Yao, Yu-Yu Chen | 2022-07-12 |