Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7374956 | Method for improved metrology by protecting photoresist profiles | Shyeu Sheng Lu, Kuei-Shun Chen, Hua-Tai Lin | 2008-05-20 |
| 6866988 | Methods for measuring photoresist dimensions | Shyue-Sheng Lu, Kuei-Shun Chen, Hua-Tai Lin | 2005-03-15 |
| 6767831 | Method for forming cobalt salicides | Chih-Jian Chen | 2004-07-27 |