Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327743 | Process tool and method for handling semiconductor substrate | — | 2025-06-10 |
| 11581204 | Semiconductor device manufacturing system and method for manufacturing semiconductor device | — | 2023-02-14 |
| 11155916 | Apparatus and methods for pumping gases from a chamber | — | 2021-10-26 |