Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4475982 | Deep trench etching process using CCl.sub.2 F.sub.2 /Ar and CCl.sub.2 F.sub. /O.sub.2 RIE | Ronald N. Schulz | 1984-10-09 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4475982 | Deep trench etching process using CCl.sub.2 F.sub.2 /Ar and CCl.sub.2 F.sub. /O.sub.2 RIE | Ronald N. Schulz | 1984-10-09 |