Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901215 | Vacuum wafer chuck for manufacturing semiconductor devices | Chin-Shen Hsieh | 2024-02-13 |
| 11335585 | Vacuum wafer chuck for manufacturing semiconductor devices | Chin-Shen Hsieh | 2022-05-17 |
| 10763082 | Chamber of plasma system, liner for plasma system and method for installing liner to plasma system | Wen-Pao Tsai | 2020-09-01 |
| 10269544 | Gas ring for plasma system and method of manufacturing the same | Wen-Pao Tsai, Tsung-Yu Huang | 2019-04-23 |