Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11654461 | Plasma ashing method using residue gas analyzer | Ya-Ping Chen, Chien-Hung Lin, Wen-Pin Liu, Chin-Wen Chen | 2023-05-23 |
| 11020778 | Photoresist removal method using residue gas analyzer | Ya-Ping Chen, Chien-Hung Lin, Wen-Pin Liu, Chin-Wen Chen | 2021-06-01 |