CC

Ching-Fa Chen

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #2,952,404 of 4,157,543Top 75%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9691640 Mechanisms for cleaning load ports of semiconductor process tools Hung-Wen Chen, Mei-Wei Wu 2017-06-27