Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9527649 | Mask storage device for mask haze prevention | Yung-Chih Chang | 2016-12-27 |
| 8925290 | Mask storage device for mask haze prevention and methods thereof | Yung-Chih Chang | 2015-01-06 |
| 8142959 | Method and apparatus for gating photomask contamination | — | 2012-03-27 |
| 7635652 | Mask with hydrophobic surface | — | 2009-12-22 |
| 6727029 | Method for making reticles with reduced particle contamination and reticles formed | Cheng-Ming Wu, Paul K. Chu, Chiou-Sung Chiu | 2004-04-27 |