Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087634 | Methods for improvement of photoresist patterning profile | Ke-Ming Chen, Ting-Jung Chang, Hsin-Chen CHENG | 2024-09-10 |
| 11551977 | Methods for improvement of photoresist patterning profile | Ke-Ming Chen, Ting-Jung Chang, Hsin-Chen CHENG | 2023-01-10 |
| 9799497 | Patterned processing kits for material processing | Chen-Fang Chung, Hsiao-Chuan Lee, Kuo-Pin Chuang, Shuen-Liang Tseng | 2017-10-24 |