Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12090602 | Platen rotation device | Bruce CHO, Huang-Chu Ko | 2024-09-17 |
| 11679468 | Chemical-mechanical polishing system and method | — | 2023-06-20 |
| 11446712 | System for cleaning wafer in CMP process of semiconductor manufacturing fabrication | Chia-Lin Hsueh | 2022-09-20 |
| 11072051 | Platen rotation method | Bruce CHO, Huang-Chu Ko | 2021-07-27 |
| 10864557 | System for cleaning wafer in CMP process of semiconductor manufacturing fabrication | Chia-Lin Hsueh | 2020-12-15 |
| 10576606 | Platen rotation system and method | Bruce CHO, Huang-Chu Ko | 2020-03-03 |
| 9610615 | Method and system for cleansing wafer in CMP process of semiconductor manufacturing fabrication | Chia-Lin Hsueh | 2017-04-04 |