Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9051649 | Semiconductor film deposition apparatus and method with improved heater cooling efficiency | Pao-Tsung Lai, Ching-Chung Cheng, Chi-Feng Chen | 2015-06-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9051649 | Semiconductor film deposition apparatus and method with improved heater cooling efficiency | Pao-Tsung Lai, Ching-Chung Cheng, Chi-Feng Chen | 2015-06-09 |