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Chia-Chiun Chen

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #3,055,982 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9051649 Semiconductor film deposition apparatus and method with improved heater cooling efficiency Pao-Tsung Lai, Ching-Chung Cheng, Chi-Feng Chen 2015-06-09