Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5886356 | Automatic supervision system on the ion beam map for ion implantation process | Pau-Lo Hsu, Li Shen, Chin-Shien Yang | 1999-03-23 |
| 5859437 | Intelligent supervision system with expert system for ion implantation process | Pau-Lo Hsu, Li Shen, Chin-Shien Yang | 1999-01-12 |