Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730610 | Multiple thickness hard mask method for optimizing laterally adjacent patterned layer linewidths | Ming Sun, Shean-Ren Horng, Yens Ho | 2004-05-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730610 | Multiple thickness hard mask method for optimizing laterally adjacent patterned layer linewidths | Ming Sun, Shean-Ren Horng, Yens Ho | 2004-05-04 |