Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11738423 | Chemical mechanical polishing apparatus and method | — | 2023-08-29 |
| 8058613 | Micromechanical devices for materials characterization | Jun Lou, Yogeeswaran Ganesan, Yang Lu | 2011-11-15 |