Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727155 | Method for spin etching sidewall spacers by acid vapor | Jiunn-Der Yang, Yuan-Chang Huang | 2004-04-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727155 | Method for spin etching sidewall spacers by acid vapor | Jiunn-Der Yang, Yuan-Chang Huang | 2004-04-27 |