Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080545 | Showerhead assembly and method of servicing assembly for semiconductor manufacturing | Po-Wei Wang, Hsiao-Feng Lu | 2024-09-03 |
| 11885008 | Film forming apparatus and method for reducing arcing | Po-Wei Wang | 2024-01-30 |
| 11769659 | Showerhead assembly and method of servicing assembly for semiconductor manufacturing | Po-Wei Wang, Hsiao-Feng Lu | 2023-09-26 |
| 11578402 | Film forming apparatus and method for reducing arcing | Po-Wei Wang | 2023-02-14 |