Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253922 | Immersion lithography system using a sealed wafer bath | Ching-Yu Chang | 2012-08-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8253922 | Immersion lithography system using a sealed wafer bath | Ching-Yu Chang | 2012-08-28 |