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Method and apparatus for fabrication of thin films by chemical vapor deposition |
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Ferroelectric field effect transistor, memory utilizing same, and method of operating same |
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Metal organic precursors for transparent metal oxide thin films and method of making same |
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Fluorescent lamp and method of manufacturing same |
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Method and apparatus for preparing integrated circuit thin films by chemical vapor deposition |
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2000-08-29 |
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Composition and process using ester solvents for fabricating metal oxide films and electronic devices including the same |
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