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Janusz Schulz

SG Suss Microtec Lithography Gmbh: 1 patents #27 of 59Top 50%
Overall (All Time): #2,887,750 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9958795 Spacer displacement device for a wafer illumination unit and wafer illumination unit Matthias Conradi 2018-05-01