Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049746 | Substrate cassette | — | 2021-06-29 |
| 10343292 | End effector | — | 2019-07-09 |
| 10259124 | Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector | — | 2019-04-16 |
| 10103049 | Method and apparatus for preventing the deformation of a substrate supported at its edge area | — | 2018-10-16 |