Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409876 | Apparatus for etching a workpiece | Lee Campbell Boman | 2002-06-25 |
| 6355181 | Method and apparatus for manufacturing a micromechanical device | — | 2002-03-12 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409876 | Apparatus for etching a workpiece | Lee Campbell Boman | 2002-06-25 |
| 6355181 | Method and apparatus for manufacturing a micromechanical device | — | 2002-03-12 |