Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7713378 | Ozone processing device | Tatsuo Kikuchi, Takeo Yamanaka, Yukitaka Yamaguchi | 2010-05-11 |
| 6939409 | Cleaning method and etching method | Hiroaki Kouno | 2005-09-06 |
| 6913653 | Cleaning and etching methods and their apparatuses | Hiroaki Kouno | 2005-07-05 |
| 6867150 | Ozone treatment method and ozone treatment apparatus | Tatsuo Kikuchi, Takeo Yamanaka, Yukitaka Yamaguchi | 2005-03-15 |