Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7229496 | Process for producing silicon single crystal layer and silicon single crystal layer | Takashi Shibayama, Yoshio Murakami | 2007-06-12 |
| 7067005 | Silicon wafer production process and silicon wafer | Takashi Shibayama, Yoshio Murakami | 2006-06-27 |
| 4411763 | Sputtering apparatus | Takeshi Itaba, Akio Nishiyama, Noribumi Kikuchi, Yuzo Ohsawa | 1983-10-25 |