Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9200428 | Shovel | — | 2015-12-01 |
| 8435021 | Mold clamping device | Norihito Okada, Shinji Terada | 2013-05-07 |
| 7060990 | Stage base, substrate processing apparatus, and maintenance method for stage | Toshiharu Tanaka, Itsushi Iio | 2006-06-13 |
| 6335791 | Apparatus for detecting positions of wafer and mask and deformation error detecting method | — | 2002-01-01 |
| 6295120 | Position detection technique applied to proximity exposure | — | 2001-09-25 |
| 6285439 | Position detection technique applied to proximity exposure | — | 2001-09-04 |
| 6233043 | Position detection technique applied to proximity exposure | — | 2001-05-15 |
| 6191858 | Position detecting method and apparatus using optical system with oblique optical axes | — | 2001-02-20 |
| 6049373 | Position detection technique applied to proximity exposure | — | 2000-04-11 |
| 6046508 | Position detecting method with observation of position detecting marks | — | 2000-04-04 |
| 5965307 | Position detecting method with observation of position detecting marks | — | 1999-10-12 |
| 5958633 | Exposure mask adapted for position detecting with oblique incident light | — | 1999-09-28 |
| 5827629 | Position detecting method with observation of position detecting marks | — | 1998-10-27 |
| 5218193 | Double-focus measurement apparatus utilizing chromatic aberration by having first and second bodies illuminated respectively by a single wavelength ray and a ray having a plurality of wavelengths | — | 1993-06-08 |
| 5141322 | Illumination methods with plural wavelength rays and with wavelength-band rays for use in a double-focus detector utilizing chromatic aberration | — | 1992-08-25 |
| 5074667 | Position detector employing a sector Fresnel zone plate | — | 1991-12-24 |
| 5026976 | Double-focus detector utilizing chromatic aberration | — | 1991-06-25 |
| 4918301 | Position sensor having double focuses and utilizing a chromatic aberration | — | 1990-04-17 |