Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920576 | Cryopump and method of monitoring cryopump | — | 2024-03-05 |
| 11885321 | Cryopump, cryopump system, and method for starting operation of cryopump | Toshiyuki Kimura | 2024-01-30 |
| 11732703 | Cryopump and regeneration method of cryopump | — | 2023-08-22 |
| 10393099 | Cryopump system, cryopump controller, and cryopump regeneration method | — | 2019-08-27 |
| 10100821 | Cold trap and control method of cold trap | — | 2018-10-16 |
| 9999844 | Cold trap | — | 2018-06-19 |
| 9707493 | Cold trap | — | 2017-07-18 |
| 9605667 | Cryopump and method for vacuum pumping non-condensable gas | — | 2017-03-28 |