Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825654 | Ion implantation apparatus and measurement device | Noriyasu Ido, Hiroyuki Kariya | 2020-11-03 |
| 9837248 | Ion implantation apparatus and method of controlling ion implantation apparatus | Daisuke Imai, Shiro Ninomiya | 2017-12-05 |