Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7338814 | Method for fabricating ferroelectric capacitive element and ferroelectric capacitive element | — | 2008-03-04 |
| 7132300 | Method for forming ferroelectric film and semiconductor device | Shinichiro Hayashi | 2006-11-07 |
| 6994750 | Film evaluating method, temperature measuring method, and semiconductor device manufacturing method | — | 2006-02-07 |