Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5885754 | Method of forming a pattern | — | 1999-03-23 |
| 5648199 | Method of forming a resist pattern utilizing an acid water-soluble material overlayer on the resist film | — | 1997-07-15 |
| 5591654 | Method of manufacturing a semiconductor device and a resist composition used therein | — | 1997-01-07 |
| 5426016 | Method of forming and removing resist pattern | Hirofumi Fujioka, Yasuhiro Yoshida, Hiroyuki Nakajima, Hitoshi Nagata | 1995-06-20 |
| 5252433 | Method of forming and removing resist pattern | Hirofumi Fujioka, Yasuhiro Yoshida, Hiroyuki Nakajima, Hitoshi Nagata | 1993-10-12 |
| 5217851 | Pattern forming method capable of providing an excellent pattern of high resolution power and high sensitivity | Akemi Fukui | 1993-06-08 |
| 5123998 | Method of forming patterns | — | 1992-06-23 |