Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6710451 | Interconnect structure and method for forming the same | — | 2004-03-23 |
| 6602802 | Method of forming a porous film on a substrate | — | 2003-08-05 |
| 6558756 | Method of forming interlayer insulating film | Gaku Sugahara, Koji Arai, Kazuyuki Sawada | 2003-05-06 |
| 6545361 | Semiconductor device having multilevel interconnection structure and method for fabricating the same | Tetsuya Ueda, Eiji Tamaoka | 2003-04-08 |
| 6458720 | Method for forming interlayer dielectric film | — | 2002-10-01 |
| 6455436 | Method of fabricating semiconductor device | Tetsuya Ueda, Eiji Tamaoka | 2002-09-24 |
| 6387824 | Method for forming porous forming film wiring structure | — | 2002-05-14 |
| 6333257 | Interconnection structure and method for forming the same | — | 2001-12-25 |
| 6319854 | Method of forming porous film and material for porous film | — | 2001-11-20 |
| 6287973 | Method for forming interconnection structure | — | 2001-09-11 |
| 6242339 | Interconnect structure and method for forming the same | — | 2001-06-05 |
| 6242336 | Semiconductor device having multilevel interconnection structure and method for fabricating the same | Tetsuya Ueda, Eiji Tamaoka | 2001-06-05 |
| 6232237 | Method for fabricating semiconductor device | Eiji Tamaoka, Tetsuya Ueda | 2001-05-15 |
| 6200912 | Semiconductor device and method of producing the same | — | 2001-03-13 |
| 6197696 | Method for forming interconnection structure | — | 2001-03-06 |
| 6194029 | Method of forming porous film and material for porous film | — | 2001-02-27 |
| 6171979 | Semiconductor device and method of producing the same | — | 2001-01-09 |
| 5989998 | Method of forming interlayer insulating film | Gaku Sugahara, Koji Arai, Kazuyuki Sawada | 1999-11-23 |
| 5942802 | Semiconductor device and method of producing the same | — | 1999-08-24 |
| 5877080 | Method of manufacturing semiconductor device | Gaku Sugahara | 1999-03-02 |
| 5863834 | Semiconductor device and method of manufacturing the same | Akemi Kawaguchi, Minoru Kubo | 1999-01-26 |
| 5820746 | Metal surface state evaluation method and semiconductor device production method | Akemi Kawaguchi | 1998-10-13 |
| 5084125 | Apparatus and method for producing semiconductor substrate | — | 1992-01-28 |