Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812493 | Thin-film semiconductor element and method of producing same | — | 2004-11-02 |
| 6099390 | Polishing pad for semiconductor wafer and method for polishing semiconductor wafer | Tomoyasu Murakami | 2000-08-08 |
| 6074289 | Apparatus for holding substrate to be polished | Tomoyasu Murakami, Mitsunari Satake | 2000-06-13 |
| 6012967 | Polishing method and polishing apparatus | Mitsunari Satake, Tomoyasu Murakami | 2000-01-11 |
| 5997385 | Method and apparatus for polishing semiconductor substrate | — | 1999-12-07 |
| 5939132 | Alignment chips positioned in the peripheral part of the semiconductor substrate and method of manufacturing thereof | Toyokazu Fujii, Mitsuru Sekiguchi, Kazuhiko Hashimoto | 1999-08-17 |
| 5921853 | Apparatus for polishing substrate using resin film or multilayer polishing pad | — | 1999-07-13 |
| 5868610 | Mehtod and aparatus for polishing semiconductor substrate | — | 1999-02-09 |
| 5866480 | Method and apparatus for polishing semiconductor substrate | Tomoyasu Murakami | 1999-02-02 |
| 5795828 | Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device | Masayuki Endo, Akemi Kawaguchi, Shin Hashimoto | 1998-08-18 |
| 5791973 | Apparatus for holding substrate to be polished and apparatus and method for polishing substrate | — | 1998-08-11 |
| 5769697 | Method and apparatus for polishing semiconductor substrate | — | 1998-06-23 |
| 5683921 | Semiconductor device and method of manufacturing the same | Susumu Akamatsu, Yasusi Okuda | 1997-11-04 |
| 5645628 | Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device | Masayuki Endo, Akemi Kawaguchi, Shin Hashimoto | 1997-07-08 |
| 5451261 | Metal film deposition apparatus and metal film deposition method | Toyokazu Fujii, Mitsuru Sekiguchi, Kazuhiko Hashimoto | 1995-09-19 |
| 5223729 | Semiconductor device and a method of producing the same | Chiaki Kudoh, Akito Uno | 1993-06-29 |