Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5327012 | Semiconductor device having a double-layer interconnection structure | Tetsuya Ueda, Teruhito Ohnishi, Hiroshi Nishimura | 1994-07-05 |
| 5198884 | Semiconductor devices having a double-layer interconnection structure | Tetsuya Ueda, Teruhito Ohnishi, Hiroshi Nishimura | 1993-03-30 |
| 5180436 | Microwave plasma film deposition system | Tetsuya Ueda, Naoki Suzuki | 1993-01-19 |
| 5132748 | Semiconductor memory device | — | 1992-07-21 |
| 5125358 | Microwave plasma film deposition system | Tetsuya Ueda, Naoki Suzuki | 1992-06-30 |
| 5076877 | Apparatus for dry etching | Tetsuya Ueda | 1991-12-31 |
| 4977104 | Method for producing a semiconductor device by filling hollows with thermally decomposed doped and undoped polysilicon | Kazuyuki Sawada, Hisashi Ogawa, Tsutomu Fujita | 1990-12-11 |
| 4661830 | Solid state imager | Yoshio Ohta, Takao Chikamura, Yutaka Miyata, Shinji Fujiwara | 1987-04-28 |