| 9793365 |
Method for manufacturing silicon carbide semiconductor device having trench |
Yu Saitoh, Takeyoshi Masuda |
2017-10-17 |
| 9627487 |
Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device |
Yu Saitoh, Takeyoshi Masuda |
2017-04-18 |
| 8964809 |
Semiconductor optical integrated device |
Yoshihiro Yoneda, Masaki Yanagisawa, Kenji Koyama, Hirohiko Kobayashi |
2015-02-24 |
| 8889445 |
Method for manufacturing semiconductor optical device and semiconductor optical device |
— |
2014-11-18 |
| 8772113 |
Method for manufacturing silicon carbide semiconductor device |
Takeyoshi Masuda, Yu Saitoh |
2014-07-08 |
| 8637329 |
Method for producing semiconductor optical integrated device |
Yoshihiro Yoneda, Hirohiko Kobayashi, Kenji Koyama, Masaki Yanagisawa |
2014-01-28 |
| 8637338 |
Method for producing integrated optical device |
Tomokazu Katsuyama |
2014-01-28 |
| 8597966 |
Method for producing semiconductor optical device |
— |
2013-12-03 |
| 8563342 |
Method of making semiconductor optical integrated device by alternately arranging spacers with integrated device arrays |
Yoshihiro Yoneda, Hirohiko Kobayashi, Kenji Koyama, Masaki Yanagisawa |
2013-10-22 |
| 8409889 |
Method for producing semiconductor optical device |
— |
2013-04-02 |
| 8216868 |
Method of fabricating semiconductor laser |
— |
2012-07-10 |
| 8039282 |
Semiconductor optical device and method of fabricating the same |
Manabu Yoshimura, Nobuyuki Ikoma |
2011-10-18 |
| 7947520 |
Semiconductor laser and method of making the same |
Hideki Yagi, Toshio Nomaguchi |
2011-05-24 |
| 7897422 |
Semiconductor light-emitting device and a method to produce the same |
— |
2011-03-01 |
| 7807489 |
Light-emitting device with a protection layer to prevent the inter-diffusion of zinc (Zn) atoms |
Mitsuo Takahashi, Akiko Kumagai |
2010-10-05 |
| 7772023 |
Method of producing semiconductor optical device |
— |
2010-08-10 |
| 7456040 |
Method for producing semiconductor optical device |
Kouichiro Yamazaki |
2008-11-25 |
| 6818521 |
Method of manufacturing a hetero-junction bipolar transistor with epitaxially grown multi-layer films and annealing at or below 600° C. |
— |
2004-11-16 |
| 4186234 |
Light transmissible high density elastic resin composition |
Kazumi Sakashita, Yutaka Umezu, Nobuo Nakamura, Haruhisa Noda |
1980-01-29 |
