Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7393759 | Semiconductor substrate, method for fabricating the same, and method for fabricating semiconductor device | Yoshiharu Hidaka | 2008-07-01 |
| 7331843 | Substrate polishing method and method of manufacturing semiconductor device | Hideaki Kunitake, Mamoru Kanemoto, Yasunori Fukui | 2008-02-19 |
| 7102206 | Semiconductor substrate, method for fabricating the same, and method for fabricating semiconductor device | Yoshiharu Hidaka | 2006-09-05 |
| 6251000 | Substrate holder, method for polishing substrate, and method for fabricating semiconductor device | Tomoyasu Murakami, Yuichi Miyoshi | 2001-06-26 |