Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7402527 | Dry etching method, fabrication method for semiconductor device, and dry etching apparatus | Takeshi Yamashita, Takao Yamaguchi | 2008-07-22 |
| 7341922 | Dry etching method, fabrication method for semiconductor device, and dry etching apparatus | Takeshi Yamashita, Takao Yamaguchi | 2008-03-11 |
| 7148151 | Dry etching method, fabrication method for semiconductor device, and dry etching apparatus | Takeshi Yamashita, Takao Yamaguchi | 2006-12-12 |
| 6762129 | Dry etching method, fabrication method for semiconductor device, and dry etching apparatus | Takeshi Yamashita, Takao Yamaguchi | 2004-07-13 |